ADVANCED ANALYSIS / TEST

SEM

SEM

  • A scanning electron microscope is a device that scans primary electrons of short wavelengths in a vacuum state and makes imaging observations using Signal on the sample surface.
  • Signal type - allows you to observe fine parts of the device you want to observe, such as secondary electrons (SE), reflective electrons, transmission electrons, backscatter electrons, and X-rays, using high resolution, and analyze the components of the observation device.
  • Analysis of sample shape, microstructure, and components using X-rays is possible

Apply Analysis

  • Surface Analysis
    PKG, Wafer , PCB
  • Component analysis
    EDS Analysis (Inorganic Components)

Equipment Specifications

Analytical equipment details
Manufacturer/Model Name : SUPRA 60 / Carl Zeiss
1. Resolution : 1.0nm @ 15 kV,1.7nm @ 1kV,4.0nm
2. Magnification : 12 - 900,000x
3. Acceleration Voltage : 0.1 - 39 kV
4. Probe Current : 4 pA - 10 nA (20 nA optional)
5. Chamber : 520 mm (∅) x 300 mm(h)
6. 6-Axes Motorised Super-Eucentric Specimen stage
7. Image Processing : Resolution : Up to 3072 x 2304 pixel
8. EDS (Energy Dispersive X-ray Spectromenter)

Analysis Examples

  • Sectional structure
  • Whisker
  • Micro defect detection
  • Process