ADVANCED ANALYSIS / TEST

EDS

    EDS

    • X-ray spectrometer installed in SEM equipment.
    • Using X-Ray Signal generated when colliding with a material by scanning electrons, it is possible to analyze the components accurately, and the types, contents, and combinations of various elements contained in the inorganic material are analyzed using the characteristics of the X-ray wavelength.

    Apply Analysis

    • Defective Area
      Component Analysis Migration
      Impurities
    • Quantitative analysis
      Mixing ratio
      Process components
    • Qualitative analysis
      Material Components

    Equipment Specifications

    Analytical equipment details
    Manufacturer/Model Name : Thermo Electron / Super Dry II
    1. Resolving power : 139eV
    2. Qualitative/quantitative analysis Software
    3. Mapping
    4. Line Scan
    5. Point Analysis

    Analysis Examples

    EDX
    DIVISION C-K O-K Cl-K Ca-K Ti-K Cu-K
    pt1 42.32 32.82 6.41 11.58 1.32 5.55