ADVANCED ANALYSIS / TEST

DEFECT ANALYSIS SERVICE

EDS

Structure Analysis

EDS

  • X-ray spectrometer installed in SEM equipment.
  • Using X-Ray Signal generated when colliding with a material by scanning electrons, it is possible to analyze the components accurately, and the types, contents, and combinations of various elements contained in the inorganic material are analyzed using the characteristics of the X-ray wavelength.

Apply Analysis

  • Defective Area
    Component Analysis Migration
    Impurities
  • Quantitative analysis
    Mixing ratio
    Process components
  • Qualitative analysis
    Material Components

Equipment Specifications

Analytical equipment details
Manufacturer/Model Name : Thermo Electron / Super Dry II
1. Resolving power : 139eV
2. Qualitative/quantitative analysis Software
3. Mapping
4. Line Scan
5. Point Analysis

Analysis Examples

EDX
DIVISION C-K O-K Cl-K Ca-K Ti-K Cu-K
pt1 42.32 32.82 6.41 11.58 1.32 5.55