 
			 
			 
			| Manufacturer/Model Name : OKOS/ VUE 400-P | 
|---|
| 1. Motor : Quad Linear Servo | 
| 2. Sacn Speed : 1500mm/s | 
| 3. Accuracy & Repeatability : +/- 0.5 Micron | 
| 4. Scan Length : 400 mm | 
| 5. Step Length : 380mm | 
| 6. Focus Length : 35 mm | 
| 7. C-Scan Area : 360mm x 350mm | 
| 8. T-Scan Area : 360mm x 220mm | 




