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Test Analysis Division

TEST ANALYSIS DIVISION

Circuit modification(F.I.B)

F.I.B (Focused ion beam) is similar to SEM in that it processes images by scanning the ion beam on the surface of the sample. In addition, by scanning the ion beam, It is possible to etch the fine part of the sample in a desired shape, and Pt can be deposited regardless of shape and part.
By using these properties, it is possible to perform a cross-sectional analysis on defective parts which are used in the modification of semiconductor circuits and which are generated in fine areas.

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