제작사/모델명 : SUPRA 60 / Carl Zeiss |
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1. Resolution : 1.0nm @ 15 kV,1.7nm @ 1kV,4.0nm |
2. Magnification : 12 - 900,000x |
3. Acceleration Voltage : 0.1 - 39 kV |
4. Probe Current : 4 pA - 10 nA (20 nA optional) |
5. Chamber : 520 mm (∅) x 300 mm(h) |
6. 6-Axes Motorised Super-Eucentric Specimen stage |
7. Image Processing : Resolution : Up to 3072 x 2304 pixel |
8. EDS (Energy Dispersive X-ray Spectromenter) |